Structural and optical properties of zinc oxide film prepared using RF-sputtering technique for glugose biosensor
A zinc oxide (ZnO) thin film is fabricated on Si (110) substrate using the radio frequency sputtering technique. The good structural properties of the ZnO thin film on the Si substrate was confirmed via high resolution X-ray diffraction (HRXRD) and by scanning electron microscopy. The photoluminesce...
| Published in: | International Journal of Electrochemical Science |
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| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
2012
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84871137203&partnerID=40&md5=6f779f2d6b06e12268ba44e4fb48af77 |