Influence of substrate materials on the structural properties of ZnO thin films prepared by RF magnetron sputtering
ZnO films were deposited on glass and SiO2/Si substrate by RF magnetron sputtering technique using high purity ZnO target at various RF power. The structural properties of ZnO thin film deposited on glass and SiO2/Si substrate were studied. The structural properties of the films were carried out by...
| Published in: | Jurnal Teknologi |
|---|---|
| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
Penerbit UTM Press
2015
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84943227391&doi=10.11113%2fjt.v76.5650&partnerID=40&md5=03c2704b422410f7af3654bda31048ad |