Structural and optical properties of zinc oxide film prepared using RF-sputtering technique for glugose biosensor

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Structural and optical properties of zinc oxide film prepared using RF-sputtering technique for glugose biosensor

A zinc oxide (ZnO) thin film is fabricated on Si (110) substrate using the radio frequency sputtering technique. The good structural properties of the ZnO thin film on the Si substrate was confirmed via high resolution X-ray diffraction (HRXRD) and by scanning electron microscopy. The photoluminesce...

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Bibliographic Details
Published in:	International Journal of Electrochemical Science
Main Author:	Hashim A.J.; Ghazai A.J.; Jaafar M.S.; Mansor N.; Zain Z.
Format:	Article
Language:	English
Published:	2012
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-84871137203&partnerID=40&md5=6f779f2d6b06e12268ba44e4fb48af77

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