The effect of sputtering pressure on structural, optical and electrical properties of indium tin oxide nanocolumns prepared by radio frequency (RF) magnetron sputtering
In the present study, transparent conductive indium tin oxide (ITO) nanocolumns are successfully deposited on glass and silicon substrates by radio frequency (RF) magnetron sputtering system. The effects of sputtering pressure on the morphological, structural, electrical and optical properties of th...
| 出版年: | Superlattices and Microstructures |
|---|---|
| 第一著者: | |
| フォーマット: | 論文 |
| 言語: | English |
| 出版事項: |
Academic Press
2014
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| オンライン･アクセス: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84900343004&doi=10.1016%2fj.spmi.2014.03.023&partnerID=40&md5=43d662c43fab98ffe77254080dd743e8 |