Ionization Characteristic of Different Gases Inside Zinc Oxide Target During Sputtering Process Simulated Using SRIM Software

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Ionization Characteristic of Different Gases Inside Zinc Oxide Target During Sputtering Process Simulated Using SRIM Software

The aim of the paper is to study a distribution of ions inside a zinc oxide (ZnO) target during sputtering process using different gases. The plots of ion distribution were obtained from the simulation results using Stopping and Range of Ions in Matter (SRIM)-2013 software. Generally, the SRIM softw...

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Bibliographic Details
Published in:	Lecture Notes in Mechanical Engineering
Main Author:	Nazri N.S.M.; Mamat M.H.; Parimon N.; Malek M.F.; Yaakob M.K.; Suriani A.B.; Mohamed A.; Ahmad M.K.; Nayan N.; Shameem Banu I.B.; Vasimalai N.; Ahmad M.Y.; Rusop M.
Format:	Conference paper
Language:	English
Published:	Springer Science and Business Media Deutschland GmbH 2022
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-85137981443&doi=10.1007%2f978-981-19-2890-1_37&partnerID=40&md5=30f740d33a28f4566e33cc54c3fd7d5e

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