Ionization Characteristic of Different Gases Inside Zinc Oxide Target During Sputtering Process Simulated Using SRIM Software

by Nazri N.S.M.; Mamat M.H.; Parimon N.; Malek M.F.; Yaakob M.K.; Suriani A.B.; Mohamed A.; Ahmad M.K.; Nayan N.; Shameem Banu I.B.; Vasimalai N.; Ahmad M.Y.; Rusop M.
Published in Lecture Notes in Mechanical Engineering (2022)