Ionization Characteristic of Different Gases Inside Zinc Oxide Target During Sputtering Process Simulated Using SRIM Software
The aim of the paper is to study a distribution of ions inside a zinc oxide (ZnO) target during sputtering process using different gases. The plots of ion distribution were obtained from the simulation results using Stopping and Range of Ions in Matter (SRIM)-2013 software. Generally, the SRIM softw...
| Published in: | Lecture Notes in Mechanical Engineering |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
Springer Science and Business Media Deutschland GmbH
2022
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85137981443&doi=10.1007%2f978-981-19-2890-1_37&partnerID=40&md5=30f740d33a28f4566e33cc54c3fd7d5e |