The fabrication and indentation of cubic silicon carbide diaphragm for acoustic sensing
In this study, 550 nm thick cubic silicon carbide square diaphragms were back etched from Si substrate. Then, indentation was carried out to samples with varying dimensions, indentation lo-cations, and loads. The influence of three parameters is documented by analyzing load-displacement curves. It w...
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| Language: | English |
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MDPI
2021
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85115058464&doi=10.3390%2fmi12091101&partnerID=40&md5=abdb413365d7c88bcdb05f9f7102bb1a |
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2-s2.0-85115058464 Zawawi S.A.; Hamzah A.A.; Majlis B.Y.; Mohd-Yasin F. The fabrication and indentation of cubic silicon carbide diaphragm for acoustic sensing 2021 Micromachines 12 9 10.3390/mi12091101 https://www.scopus.com/inward/record.uri?eid=2-s2.0-85115058464&doi=10.3390%2fmi12091101&partnerID=40&md5=abdb413365d7c88bcdb05f9f7102bb1a In this study, 550 nm thick cubic silicon carbide square diaphragms were back etched from Si substrate. Then, indentation was carried out to samples with varying dimensions, indentation lo-cations, and loads. The influence of three parameters is documented by analyzing load-displacement curves. It was found that diaphragms with bigger area, indented at the edge, and low load demon-strated almost elastic behaviour. Furthermore, two samples burst and one of them displayed pop-in behaviour, which we determine is due to plastic deformation. Based on optimum dimension and load, we calculate maximum pressure for elastic diaphragms. This pressure is sufficient for cubic silicon carbide diaphragms to be used as acoustic sensors to detect poisonous gasses. © 2021 by the authors. Licensee MDPI, Basel, Switzerland. MDPI 2072666X English Article All Open Access; Gold Open Access |
| author |
Zawawi S.A.; Hamzah A.A.; Majlis B.Y.; Mohd-Yasin F. |
| spellingShingle |
Zawawi S.A.; Hamzah A.A.; Majlis B.Y.; Mohd-Yasin F. The fabrication and indentation of cubic silicon carbide diaphragm for acoustic sensing |
| author_facet |
Zawawi S.A.; Hamzah A.A.; Majlis B.Y.; Mohd-Yasin F. |
| author_sort |
Zawawi S.A.; Hamzah A.A.; Majlis B.Y.; Mohd-Yasin F. |
| title |
The fabrication and indentation of cubic silicon carbide diaphragm for acoustic sensing |
| title_short |
The fabrication and indentation of cubic silicon carbide diaphragm for acoustic sensing |
| title_full |
The fabrication and indentation of cubic silicon carbide diaphragm for acoustic sensing |
| title_fullStr |
The fabrication and indentation of cubic silicon carbide diaphragm for acoustic sensing |
| title_full_unstemmed |
The fabrication and indentation of cubic silicon carbide diaphragm for acoustic sensing |
| title_sort |
The fabrication and indentation of cubic silicon carbide diaphragm for acoustic sensing |
| publishDate |
2021 |
| container_title |
Micromachines |
| container_volume |
12 |
| container_issue |
9 |
| doi_str_mv |
10.3390/mi12091101 |
| url |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85115058464&doi=10.3390%2fmi12091101&partnerID=40&md5=abdb413365d7c88bcdb05f9f7102bb1a |
| description |
In this study, 550 nm thick cubic silicon carbide square diaphragms were back etched from Si substrate. Then, indentation was carried out to samples with varying dimensions, indentation lo-cations, and loads. The influence of three parameters is documented by analyzing load-displacement curves. It was found that diaphragms with bigger area, indented at the edge, and low load demon-strated almost elastic behaviour. Furthermore, two samples burst and one of them displayed pop-in behaviour, which we determine is due to plastic deformation. Based on optimum dimension and load, we calculate maximum pressure for elastic diaphragms. This pressure is sufficient for cubic silicon carbide diaphragms to be used as acoustic sensors to detect poisonous gasses. © 2021 by the authors. Licensee MDPI, Basel, Switzerland. |
| publisher |
MDPI |
| issn |
2072666X |
| language |
English |
| format |
Article |
| accesstype |
All Open Access; Gold Open Access |
| record_format |
scopus |
| collection |
Scopus |
| _version_ |
1814778505576054784 |