The fabrication and indentation of cubic silicon carbide diaphragm for acoustic sensing

by Zawawi S.A.; Hamzah A.A.; Majlis B.Y.; Mohd-Yasin F.
Published in Micromachines (2021)

A review of MEMS capacitive microphones

by Zawawi S.A.; Hamzah A.A.; Majlis B.Y.; Mohd-Yasin F.
Published in Micromachines (2020)