A review of MEMS capacitive microphones

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A review of MEMS capacitive microphones

This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrica...

書誌詳細
出版年:	Micromachines
第一著者:	Zawawi S.A.; Hamzah A.A.; Majlis B.Y.; Mohd-Yasin F.
フォーマット:	Review
言語:	English
出版事項:	MDPI AG 2020
オンライン･アクセス:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-85085731705&doi=10.3390%2fMI11050484&partnerID=40&md5=63e12bd450ac185fb8d58ff08d6c68a5

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