Structural and optical properties of zinc oxide film prepared using RF-sputtering technique for glugose biosensor
A zinc oxide (ZnO) thin film is fabricated on Si (110) substrate using the radio frequency sputtering technique. The good structural properties of the ZnO thin film on the Si substrate was confirmed via high resolution X-ray diffraction (HRXRD) and by scanning electron microscopy. The photoluminesce...
出版年: | International Journal of Electrochemical Science |
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第一著者: | |
フォーマット: | 論文 |
言語: | English |
出版事項: |
Electrochemical Science Group
2012
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オンライン・アクセス: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84871137203&doi=10.1016%2fs1452-3981%2823%2916510-2&partnerID=40&md5=2478255148fd52fa9c1ddecd8ede1e1f |