EGFET pH Sensor Performance Dependence on Sputtered TiO2 Sensing Membrane Deposition Temperature
Titanium dioxide (TiO2) thin films were sputtered by radio frequency (RF) magnetron sputtering method and have been employed as the sensing membrane of an extended gate field effect transistor (EGFET) for pH sensing detection application. The TiO2 thin films were deposited onto indium tin oxide (ITO...
| Published in: | Journal of Sensors |
|---|---|
| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2016
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84984852141&doi=10.1155%2f2016%2f7594531&partnerID=40&md5=8d48b5c22adecd43a1fc00342241f26d |