Impact of Nanowire Radius and Channel Thickness with High-k Gate Dielectric in GAA-JLT

As the transistor's size becomes smaller, degradation in the short-channel effects (SCEs) becomes more apparent. This leads to research work on multi-gate transistors such as the Fin-Field Effect Transistor (FinFET) and Gate-All-Around (GAA) transistor, where the 3D architecture have been shown...

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Bibliographic Details
Published in:INTERNATIONAL JOURNAL OF NANOELECTRONICS AND MATERIALS
Main Authors: Vespanathan, Nilaventhiran; Othman, Noraini; Sabki, S. N.; Abd Rahim, Alhan Farhanah
Format: Article
Language:English
Published: UNIMAP PRESS 2023
Subjects:
Online Access:https://www-webofscience-com.uitm.idm.oclc.org/wos/woscc/full-record/WOS:001141805800006