Characterization of PZT and PNZT thin films for monolithic microwave integrated circuit applications
Ferroelectric material is widely known for its high dielectric constant. The preparation of the thin ferroelectric films is interrelated to the dielectric properties when an application is concerned. In order to investigate the dielectric properties of the film, the respective sample is characterize...
Published in: | IEEE Region 10 Annual International Conference, Proceedings/TENCON |
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Main Author: | |
Format: | Conference paper |
Language: | English |
Published: |
2011
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Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84856836437&doi=10.1109%2fTENCON.2011.6129003&partnerID=40&md5=7bfb8c18653989c8130081ca9e67256c |