Mesh grid of SILVACO TCAD effect on net doping profile for NMOS structures
Process of developing the NMOS structure is performed in 2D SILVACO Athena and Atlas Simulation. The NMOS fabrication process steps were chosen from reference [4]. Mesh grid effect on net doping profile was obtained by varying the grid. Variation of grid was determined through observation between fi...
| Published in: | AIP Conference Proceedings |
|---|---|
| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
2009
|
| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-70450286458&doi=10.1063%2f1.3160211&partnerID=40&md5=bb28df01dd6241325f13a5bc5f696a1e |