Quantum confinement of integrated pulse electrochemical etching of porous silicon for metal semiconductor metal photodetector
Porous silicon (PS) was successfully synthesized via novel integrated pulsed electrochemical etching of an n-type (100) silicon (Si) substrate under various condition. The PS was etched using hydrofluoric acid (HF) based solution and the porosity was optimized by introducing electroless chemical etc...
| Published in: | Materials Science Forum |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
Trans Tech Publications Ltd
2016
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84959899008&doi=10.4028%2fwww.scientific.net%2fMSF.846.245&partnerID=40&md5=5c4775e8f0dab64427f88284450ea0d9 |