Design and fabrication of polysilicon-based piezoresistive microcantilever for biological sensing

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Design and fabrication of polysilicon-based piezoresistive microcantilever for biological sensing

This paper describes the fabrication process of a piezoresistive microcantilever sensor that is used as a platform for biological sensing such as salivary amylase-activity. The 0.5μm-thick piezoresistive sensors are made on polysilicon-based cantilever beam. This surface micromachined microcantileve...

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Bibliographic Details
Published in:	AIP Conference Proceedings
Main Author:	2-s2.0-70450280972
Format:	Conference paper
Language:	English
Published:	2009
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-70450280972&doi=10.1063%2f1.3160261&partnerID=40&md5=741de8b962f944a0cc60f05400fa155d

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