Enhanced Electrothermal Analysis for Acetone Gas Detection Based on PolyMUMPs MEMS Sensor

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Enhanced Electrothermal Analysis for Acetone Gas Detection Based on PolyMUMPs MEMS Sensor

Environmental monitoring for the detection and regulation of toxic gases is of paramount importance. This study proposes the modeling and fabrication of MEMS devices based on the standard Polysilicon Multi-Users MEMS Process (PolyMUMPs) for acetone gas detection. Titanium dioxide (TiO_{2} ) nanopart...

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Bibliographic Details
Published in:	IEEE Access
Main Author:	Algamili A.S.; Abidin Z.Z.; Khir M.H.B.M.; Ahmed A.Y.; Hashwan S.S.B.; Isyaku U.B.; Al-Dhawi B.N.; Salem A.A.
Format:	Article
Language:	English
Published:	Institute of Electrical and Electronics Engineers Inc. 2024
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-85186154457&doi=10.1109%2fACCESS.2024.3365191&partnerID=40&md5=514954ee6f15dd7290bd7ee7942322c1

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