Enhanced Electrothermal Analysis for Acetone Gas Detection Based on PolyMUMPs MEMS Sensor
Environmental monitoring for the detection and regulation of toxic gases is of paramount importance. This study proposes the modeling and fabrication of MEMS devices based on the standard Polysilicon Multi-Users MEMS Process (PolyMUMPs) for acetone gas detection. Titanium dioxide (TiO_{2} ) nanopart...
| Published in: | IEEE Access |
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| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2024
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85186154457&doi=10.1109%2fACCESS.2024.3365191&partnerID=40&md5=514954ee6f15dd7290bd7ee7942322c1 |