Identifying the Performance of Porous Silicon Based Humidity Sensors at Different Gold Contact Pad Spacings
In recent years, porous silicon (PSi) substrate has been broadly studied by other researchers for microelectronics development due to its viable physical and chemical stability qualities. However, most of the studies published were primarily concerned with the synthesis, characterization, and uses o...
| Published in: | 2023 IEEE 14th Control and System Graduate Research Colloquium, ICSGRC 2023 - Conference Proceeding |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2023
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85170065582&doi=10.1109%2fICSGRC57744.2023.10215396&partnerID=40&md5=ac0651dedc2d81cf4a6ec64f675703ab |