Enhanced Catalytic Palladium Embedded Inside Porous Silicon for Improved Hydrogen Gas Sensing; [Paladium Bermangkin Dipertingkat Terbenam di dalam Silikon Berliang untuk Pengesanan Gas Hidrogen yang Diperbaik]

In this work, we reported on room temperature porous silicon (PS) and embedding PS using simple and economical techniques of electrochemical etching and thermal evaporation. The PS substrate was prepared using the technique of electrochemically etching the n-type Si (100) wafer at a constant current...

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Bibliographic Details
Published in:Sains Malaysiana
Main Author: Abd Rahim A.F.; Razali N.S.M.; Radzali R.; Mahmood A.; Hamzah I.H.; Mohamed M.F.P.
Format: Article
Language:English
Published: Penerbit Universiti Kebangsaan Malaysia 2022
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-85146475900&doi=10.17576%2fjsm-2022-5112-17&partnerID=40&md5=098634d93b7e65bb6cea99b27b8b88a0