Influence of different etching methods on the structural properties of porous silicon

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Influence of different etching methods on the structural properties of porous silicon

Purpose: Porous silicon (Si) was fabricated by using three different wet etching methods, namely, direct current photo-assisted electrochemical (DCPEC), alternating CPEC (ACPEC) and two-step ACPEC etching. This study aims to investigate the structural properties of porous structures formed by using...

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Bibliographic Details
Published in:	Microelectronics International
Main Author:	Zulkifli F.; Radzali R.; Abd Rahim A.F.; Mahmood A.; Mohd Razali N.S.; Abu Bakar A.
Format:	Article
Language:	English
Published:	Emerald Group Holdings Ltd. 2022
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-85130519737&doi=10.1108%2fMI-01-2022-0009&partnerID=40&md5=d907b2ab867ef57415afcf56959950c4

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