Influence of different etching methods on the structural properties of porous silicon
Purpose: Porous silicon (Si) was fabricated by using three different wet etching methods, namely, direct current photo-assisted electrochemical (DCPEC), alternating CPEC (ACPEC) and two-step ACPEC etching. This study aims to investigate the structural properties of porous structures formed by using...
| Published in: | Microelectronics International |
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| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
Emerald Group Holdings Ltd.
2022
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85130519737&doi=10.1108%2fMI-01-2022-0009&partnerID=40&md5=d907b2ab867ef57415afcf56959950c4 |