A review of MEMS capacitive microphones

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A review of MEMS capacitive microphones

This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrica...

书目详细资料
发表在:	Micromachines
主要作者:	Zawawi S.A.; Hamzah A.A.; Majlis B.Y.; Mohd-Yasin F.
格式:	Review
语言:	English
出版:	MDPI AG 2020
在线阅读:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-85085731705&doi=10.3390%2fMI11050484&partnerID=40&md5=63e12bd450ac185fb8d58ff08d6c68a5

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