A review of MEMS capacitive microphones

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A review of MEMS capacitive microphones

This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrica...

وصف كامل

التفاصيل البيبلوغرافية
الحاوية / القاعدة:	Micromachines
المؤلف الرئيسي:	Zawawi S.A.; Hamzah A.A.; Majlis B.Y.; Mohd-Yasin F.
التنسيق:	Review
اللغة:	English
منشور في:	MDPI AG 2020
الوصول للمادة أونلاين:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-85085731705&doi=10.3390%2fMI11050484&partnerID=40&md5=63e12bd450ac185fb8d58ff08d6c68a5

مواد مشابهة

Design and Simulation of Micro-Electro-Mechanical Systems (MEMS) Capacitive Pressure Sensor for Thermal Runaway Detection in the Electric Vehicle
بواسطة: 2-s2.0-85181715759
منشور في: (2023)

Determination of the Aptamer Probe Density by Double Layer and Redox Capacitance of CNT-Based Electrochemical DNA-Aptasensors
بواسطة: 2-s2.0-85179843421
منشور في: (2023)

HIKERS' PERCEPTION OF THE ECOLOGICAL AND SOCIAL IMPACTS OF RECREATIONAL ACTIVITIES IN GUNUNG NUANG, MALAYSIA
بواسطة: Khairi N.; Zawawi A.A.; Bidin S.; Zawawi A.A.
منشور في: (2025)

A nationwide survey of public healthcare providers' impressions of family medicine specialists in Malaysia: A qualitative analysis of written comments
بواسطة: Chew B.-H.; Cheong A.-T.; Ismail M.; Hamzah Z.; A-Rashid M.-R.; Md-Yasin M.; Ali N.; Mohd-Salleh N.; Bashah B.
منشور في: (2016)

A nationwide survey on the expectation of public healthcare providers on family medicine specialists in Malaysia - A qualitative analysis of 623 written comments
بواسطة: Chew B.-H.; Cheong A.-T.; Ismail M.; Hamzah Z.; A-Rashid M.-R.; Md-Yasin M.; Ali N.
منشور في: (2014)

Assessment of imazapic presence in surface water and groundwater in paddy field area
بواسطة: Mazlan A.Z.; Hussain H.; Mohamed Zawawi M.A.
منشور في: (2016)

Adoption of post-disaster waste management plan into disaster management guidelines for Malaysia
بواسطة: Zawawi E.M.A.; Yusof N.S.; Ismail Z.
منشور في: (2018)

A Review on Finite Element Modelling and Simulation for Upper Limb of Human Bone and Implant
بواسطة: Al-Tam B.Y.; Ramlee M.H.; Wahab A.A.; Seng G.H.; Abdullah A.H.
منشور في: (2023)

EXPLORING ENHANCEMENT IN CONFIDENCE-BASED ASSESSMENT: A SYSTEMATIC LITERATURE REVIEW
بواسطة: Nor Azharludin N.M.; Abu Samah K.A.F.; Bin Dzulkalnine M.F.; Hamzah R.
منشور في: (2024)

Attributing Values to Organizational Performance: Analysis on the Islamic Medieval Guilds
بواسطة: Ishak, وآخرون
منشور في: (2024)

Electrospun Nanofiber Composites for Drug Delivery: A Review on Current Progresses
بواسطة: Jiffrin R.; Razak S.I.A.; Jamaludin M.I.; Hamzah A.S.A.; Mazian M.A.; Jaya M.A.T.; Nasrullah M.Z.; Majrashi M.; Theyab A.; Aldarmahi A.A.; Awan Z.; Abdel-Daim M.M.; Azad A.K.
منشور في: (2022)

Utilizing waste polyethylene for improved properties of asphalt binders and mixtures: A review
بواسطة: Assolie A.A.; Al-Migdady A.; Borowski G.; Alsaqoor S.; Ali A.S.B.; Alahmer A.
منشور في: (2025)

An Assessment Approaches and Learning Outcomes in Technical and Vocational Education: A Systematic Review Using PRISMA
بواسطة: Yusop S.R.M.; Rasul M.S.; Yasin R.M.; Hashim H.U.; Jalaludin N.A.
منشور في: (2022)

Disease History, Pathogenesis, Diagnostics, and Therapeutics for Human Monkeypox Disease: A Comprehensive Review
بواسطة: Saied A.A.; Dhawan M.; Metwally A.A.; Fahrni M.L.; Choudhary P.; Choudhary O.P.
منشور في: (2022)

Prevalence and severity of Bertolotti’s syndrome in Malaysia: A common under diagnosis
بواسطة: Noorman M.F.; Sofian A.A.; Kandar M.K.; Halim A.H.A.; Harun M.H.; Ramlee F.A.M.; Hamzah F.C.; Rahim E.A.
منشور في: (2022)

A Mini Review on Carbon Black Production as Rubber Reinforcement in Tyre Application
بواسطة: Mohammad Zainol M.; Mustaffa N.; Hassan A.H.; Mustapa A.N.; Mamat M.H.; Syed-Hassan S.S.A.; Syed Abdul Rahman S.N.F.; Mohd Azli A.A.; Hamdan K.
منشور في: (2024)

A conceptual review on edutourism in malaysia: Understanding the research trend
بواسطة: Kamdi N.; Hassan N.A.; Jamal S.A.
منشور في: (2016)

FACTORS ASSOCIATED WITH CARBON TAX AWARENESS: A SYSTEMATIC REVIEW
بواسطة: Bagubair A.A.A.; Ghani N.A.; Daud A.A.; Baharuddin M.Z.A.B.; Dapari R.; Mansor Z.; Dom N.C.; Hassan M.R.; Rahim S.S.S.A.
منشور في: (2024)

Performance of Unreinforced Masonry Walls in Compression: A Review of Design Provisions, Experimental Research, and Future Needs
بواسطة: Blash A.A.A.; Bakar B.H.A.; Udi U.J.; Dabbour B.S.A.; Jaafar A.A.; Yanhao L.; Abu Bakar I.A.; Rashed M.
منشور في: (2023)

Recent developments in sugarcane bagasse fibre-based adsorbent and their potential industrial applications: A review
بواسطة: Mubarak A.A.; Ilyas R.A.; Nordin A.H.; Ngadi N.; Alkbir M.F.M.
منشور في: (2024)

Concept drift early fault detection in wind turbine based on distance metric: A systematic literature review
بواسطة: Zhang D.; Idrus Z.; Hamzah R.
منشور في: (2025)

Concept Drift Early Fault Detection in Wind Turbine Based on Distance Metric: A Systematic Literature Review
بواسطة: Zhang, وآخرون
منشور في: (2025)

Endometrioma presented as acute abdomen in a peritoneal dialysis patient: A case report and literature review
بواسطة: Ahmad Z.A.; Ramly F.; Mohd Zahid A.Z.; Abdullah B.; Abdul Hafidz M.I.
منشور في: (2021)

Novel isoxazolinyl spiropyrrolidinediones: 1,3-dipolar cycloaddition of 1-benzyl-3,3-dimethyl-5-methylenepyrrolidin-2,4-dione
بواسطة: Bathich Y.; Syed Monudeen Khan S.E.B.; Hamzah A.S.
منشور في: (2011)

Establishing the Order of Importance Factor Based on Optimization of Conditions in PAHs Biodegradation
بواسطة: Mohd Kami N.A.F.; Tao W.; Hamzah N.
منشور في: (2022)

Vibriosis in Fish: A Review on Disease Development and Prevention
بواسطة: Ina-Salwany M.Y.; Al-saari N.; Mohamad A.; Mursidi F.-A.; Mohd-Aris A.; Amal M.N.A.; Kasai H.; Mino S.; Sawabe T.; Zamri-Saad M.
منشور في: (2019)

A systematic review on chlorine dioxide as a disinfectant
بواسطة: Jefri U.H.N.M.; Khan A.; Lim Y.C.; Lee K.S.; Liew K.B.; Kassab Y.W.; Choo C.-Y.; Al-Worafi Y.M.; Ming L.C.; Kalusalingam A.
منشور في: (2022)

Which is the best method of sterilization for recycled bone autograft in limb salvage surgery: A radiological, biomechanical and histopathological study in rabbit
بواسطة: Yasin N.F.; Singh V.A.; Saad M.; Omar E.
منشور في: (2015)

A Systematic Literature Review of an Advisory System
بواسطة: Mohd Taib A.N.; Zainuddin F.; Mokhtar R.; Kamaruddin K.A.; Basri N.A.
منشور في: (2024)

A systematic review of health sciences students’ online learning during the COVID-19 pandemic
بواسطة: Abdull Mutalib A.A.; Md. Akim A.; Jaafar M.H.
منشور في: (2022)

Aquaculture research in Southeast Asia-A scientometric analysis (1990-2019)
بواسطة: Noor M.I.M.; Azra M.N.; Lim V.-C.; Zaini A.A.; Dali F.; Hashim I.M.; Hamzah H.C.; Abdullah M.F.
منشور في: (2021)

Immune-mediated neurological syndrome in SARS-CoV-2 infection: a review of literature on autoimmune encephalitis in COVID-19
بواسطة: Payus A.O.; Jeffree M.S.; Ohn M.H.; Tan H.J.; Ibrahim A.; Chia Y.K.; Raymond A.A.
منشور في: (2022)

Washback effect of school-based english language assessment: A case-study on students' perceptions
بواسطة: Alla Baksh M.A.; Mohd Sallehhudin A.A.; Tayeb Y.A.; Norhaslinda H.
منشور في: (2016)

Iron-related Genes and Proteins Involved in Iron Homeostasis in Animal Models of Allergic Asthma: A Systematic Review
بواسطة: Wafriy C.I.; Nor-Ashikin M.N.K.; Kamsani Y.S.; Muid S.A.; Sarbandi M.S.
منشور في: (2025)

NEW RAY ON REMEDIATION OF HIGH RINGS POLYCYCLIC AROMATIC HYDROCARBONS: REMEDIATION OF RAW PETROLEUM SLUDGE USING SOLIDIFICATION AND STABILIZATION METHOD
بواسطة: Roslee N.F.; Kamil N.A.F.M.; Kadir A.A.; Jalil A.R.; Hamzah N.; Noor N.M.; Sandu A.V.
منشور في: (2022)

Analysis of Student Engagement Towards Learning Materials in Learning Management System: A Case Study
بواسطة: Noh Z.M.; Yatim N.M.; Saad W.H.M.; Hamzah R.A.; Radzi S.A.; Aziz N.H.A.
منشور في: (2024)

Cellulosic fiber nanocomposite application review with zinc oxide antimicrobial agent nanoparticle: an opt for COVID-19 purpose
بواسطة: Azizan A.; Samsudin A.A.; Shamshul Baharin M.B.; Dzulkiflee M.H.; Rosli N.R.; Abu Bakar N.F.; Adlim M.
منشور في: (2023)

A Review of the Emulsification Method for Alternative Fuels Used in Diesel Engines
بواسطة: Hamid M.F.; Teoh Y.H.; Idroas M.Y.; Mohamed M.; Sa’ad S.; Mat S.C.; Abdullah M.K.; Le T.D.; How H.G.; Nguyen H.T.
منشور في: (2022)

Thermoregulatory Comfort Properties of Sports Jersey Fabric: A Review
بواسطة: Suhaimi S.A.; Ruznan W.S.; Hussain R.N.J.R.; Nor M.A.M.; Ahmad M.R.
منشور في: (2025)

Handwriting Image Classification for Automated Diagnosis of Learning Disabilities: A Review on Deep Learning Models and Future Directions
بواسطة: Sukiman S.A.; Husin N.A.; Hamdan H.; Murad M.A.A.
منشور في: (2024)