A review of MEMS capacitive microphones

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A review of MEMS capacitive microphones

This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrica...

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Bibliographic Details
Published in:	Micromachines
Main Author:	Zawawi S.A.; Hamzah A.A.; Majlis B.Y.; Mohd-Yasin F.
Format:	Review
Language:	English
Published:	MDPI AG 2020
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-85085731705&doi=10.3390%2fMI11050484&partnerID=40&md5=63e12bd450ac185fb8d58ff08d6c68a5

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