A review of MEMS capacitive microphones
This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrica...
| Published in: | Micromachines |
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| Format: | Review |
| Language: | English |
| Published: |
MDPI AG
2020
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85085731705&doi=10.3390%2fMI11050484&partnerID=40&md5=63e12bd450ac185fb8d58ff08d6c68a5 |
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2-s2.0-85085731705 |
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2-s2.0-85085731705 Zawawi S.A.; Hamzah A.A.; Majlis B.Y.; Mohd-Yasin F. A review of MEMS capacitive microphones 2020 Micromachines 11 5 10.3390/MI11050484 https://www.scopus.com/inward/record.uri?eid=2-s2.0-85085731705&doi=10.3390%2fMI11050484&partnerID=40&md5=63e12bd450ac185fb8d58ff08d6c68a5 This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor. © 2020 by the authors. MDPI AG 2072666X English Review All Open Access; Gold Open Access |
| author |
Zawawi S.A.; Hamzah A.A.; Majlis B.Y.; Mohd-Yasin F. |
| spellingShingle |
Zawawi S.A.; Hamzah A.A.; Majlis B.Y.; Mohd-Yasin F. A review of MEMS capacitive microphones |
| author_facet |
Zawawi S.A.; Hamzah A.A.; Majlis B.Y.; Mohd-Yasin F. |
| author_sort |
Zawawi S.A.; Hamzah A.A.; Majlis B.Y.; Mohd-Yasin F. |
| title |
A review of MEMS capacitive microphones |
| title_short |
A review of MEMS capacitive microphones |
| title_full |
A review of MEMS capacitive microphones |
| title_fullStr |
A review of MEMS capacitive microphones |
| title_full_unstemmed |
A review of MEMS capacitive microphones |
| title_sort |
A review of MEMS capacitive microphones |
| publishDate |
2020 |
| container_title |
Micromachines |
| container_volume |
11 |
| container_issue |
5 |
| doi_str_mv |
10.3390/MI11050484 |
| url |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85085731705&doi=10.3390%2fMI11050484&partnerID=40&md5=63e12bd450ac185fb8d58ff08d6c68a5 |
| description |
This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor. © 2020 by the authors. |
| publisher |
MDPI AG |
| issn |
2072666X |
| language |
English |
| format |
Review |
| accesstype |
All Open Access; Gold Open Access |
| record_format |
scopus |
| collection |
Scopus |
| _version_ |
1814778506293280768 |