Raman spectra boron doped amorphous carbon thin film deposited by bias assisted-CVD

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Raman spectra boron doped amorphous carbon thin film deposited by bias assisted-CVD

Boron doped amorphous carbon thin film carbon was deposited at 200°C-350°C by bias assisted-CVD using palm oil as a precursor material. The structural boron doped amorphous carbon films were discussed by Raman analysis through the evolution of D and G bands. The spectral evolution observed showed th...

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Bibliographic Details
Published in:	AIP Conference Proceedings
Main Author:	Ishak A.; Fadzilah A.N.; Dayana K.; Saurdi I.; Malek M.F.; Nurbaya Z.; Shafura A.K.; Rusop M.
Format:	Conference paper
Language:	English
Published:	American Institute of Physics Inc. 2018
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-85047372838&doi=10.1063%2f1.5036893&partnerID=40&md5=5bd193a4abf859b1e699042c80b8d656

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