Raman spectra boron doped amorphous carbon thin film deposited by bias assisted-CVD
Boron doped amorphous carbon thin film carbon was deposited at 200°C-350°C by bias assisted-CVD using palm oil as a precursor material. The structural boron doped amorphous carbon films were discussed by Raman analysis through the evolution of D and G bands. The spectral evolution observed showed th...
| Published in: | AIP Conference Proceedings |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
American Institute of Physics Inc.
2018
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85047372838&doi=10.1063%2f1.5036893&partnerID=40&md5=5bd193a4abf859b1e699042c80b8d656 |