Hydrogenated nanostructure boron doped amorphous carbon films by DC bias
Hydrogenated nanostructure-boron doped amorphous carbon thin film carbon was deposited at different negative bias using custom-made deposition bias assisted-CVD. Solid of boron and palm oil were used as dopant and carbon source, respectively. The hydrogenated nanostructure amorphous films were chara...
| Published in: | IOP Conference Series: Materials Science and Engineering |
|---|---|
| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
Institute of Physics Publishing
2018
|
| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85046341088&doi=10.1088%2f1757-899X%2f341%2f1%2f012017&partnerID=40&md5=cf4286f8638e54f1c1239fac79976daa |