Aging- and thermal-annealing effects on the vibrational- and microstructural-properties of PECVD grown hydrogenated amorphous silicon carbon nitride thin films

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Aging- and thermal-annealing effects on the vibrational- and microstructural-properties of PECVD grown hydrogenated amorphous silicon carbon nitride thin films

In this work, the hydrogenated amorphous silicon carbon nitride (a-SiCN:H) thin films were grown by PECVD from the discharge of silane (SiH4), methane (CH4) and nitrogen (N2) gases. Thereafter, the stability of the bonding and microstructural properties with respect to the effects of aging (under at...

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Bibliographic Details
Published in:	Vibrational Spectroscopy
Main Author:	Rahman M.A.A.; Goh B.T.; Chiu W.S.; Haw C.Y.; Mahmood M.R.; Khiew P.S.; Rahman S.A.
Format:	Article
Language:	English
Published:	Elsevier B.V. 2018
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-85034081879&doi=10.1016%2fj.vibspec.2017.11.002&partnerID=40&md5=6cb5235302e29353d644998ea1ddb096

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