Aging- and thermal-annealing effects on the vibrational- and microstructural-properties of PECVD grown hydrogenated amorphous silicon carbon nitride thin films
In this work, the hydrogenated amorphous silicon carbon nitride (a-SiCN:H) thin films were grown by PECVD from the discharge of silane (SiH4), methane (CH4) and nitrogen (N2) gases. Thereafter, the stability of the bonding and microstructural properties with respect to the effects of aging (under at...
| Published in: | Vibrational Spectroscopy |
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| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
Elsevier B.V.
2018
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85034081879&doi=10.1016%2fj.vibspec.2017.11.002&partnerID=40&md5=6cb5235302e29353d644998ea1ddb096 |