Effect of varying nitrogen flow rates on the optical properties of amorphous-SiCN thin films
Series of amorphous silicon carbon nitride (a-SiCN) films are synthesized using RF-PECVD technique on glass and silicon substrates from precursor gas of silane, methane and nitrogen. In this work, the change in nitrogen flow rate from 0 sccm to 50 sccm is a mean used to vary the elemental compositio...
| Published in: | AIP Conference Proceedings |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
American Institute of Physics Inc.
2016
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85014582585&doi=10.1063%2f1.4966810&partnerID=40&md5=459e85925eebe861e81b2d805cebf8f2 |