Effect of varying nitrogen flow rates on the optical properties of amorphous-SiCN thin films

Effect of varying nitrogen flow rates on the optical properties of amorphous-SiCN thin films

Series of amorphous silicon carbon nitride (a-SiCN) films are synthesized using RF-PECVD technique on glass and silicon substrates from precursor gas of silane, methane and nitrogen. In this work, the change in nitrogen flow rate from 0 sccm to 50 sccm is a mean used to vary the elemental compositio...

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Bibliographic Details
Published in:AIP Conference Proceedings
Main Author: Rahman M.A.A.; Tong G.B.; Mahmood M.R.; Siong C.W.; Yian H.C.; Rahman S.A.
Format: Conference paper
Language:English
Published: American Institute of Physics Inc. 2016
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-85014582585&doi=10.1063%2f1.4966810&partnerID=40&md5=459e85925eebe861e81b2d805cebf8f2

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