Boron-doped amorphous carbon film grown by bias assisted pyrolysis chemical vapor deposition

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Boron-doped amorphous carbon film grown by bias assisted pyrolysis chemical vapor deposition

Boron-doped amorphous carbon (a-C:B) films were successfully synthesized via a bias-assisted pyrolysis-chemical vapor deposition (CVD). The effect of substrate bias on the thickness, surface morphology, electrical properties of a-C:B film were investigated. The AFM measurements and conductivity resu...

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Bibliographic Details
Published in:	IEICE Electronics Express
Main Author:	Annuar I.; Rouhi J.; Rusop M.
Format:	Article
Language:	English
Published:	Institute of Electronics Information Communication Engineers 2015
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-84943819813&doi=10.1587%2felex.11.20140937&partnerID=40&md5=47eb7a4aa5b37131df572ae1daf4f2ff

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