Influence of substrate materials on the structural properties of ZnO thin films prepared by RF magnetron sputtering

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Influence of substrate materials on the structural properties of ZnO thin films prepared by RF magnetron sputtering

ZnO films were deposited on glass and SiO2/Si substrate by RF magnetron sputtering technique using high purity ZnO target at various RF power. The structural properties of ZnO thin film deposited on glass and SiO2/Si substrate were studied. The structural properties of the films were carried out by...

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Bibliographic Details
Published in:	Jurnal Teknologi
Main Author:	Ahmad S.; Md Sin N.D.; Roslan L.; Pahroraji H.F.; Alias S.K.; Sulaiman S.A.; Hashim S.M.; Berhan M.N.; Rusop M.
Format:	Article
Language:	English
Published:	Penerbit UTM Press 2015
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-84943227391&doi=10.11113%2fjt.v76.5650&partnerID=40&md5=03c2704b422410f7af3654bda31048ad

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