The effect of sputtering pressure on structural, optical and electrical properties of indium tin oxide nanocolumns prepared by radio frequency (RF) magnetron sputtering

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The effect of sputtering pressure on structural, optical and electrical properties of indium tin oxide nanocolumns prepared by radio frequency (RF) magnetron sputtering

In the present study, transparent conductive indium tin oxide (ITO) nanocolumns are successfully deposited on glass and silicon substrates by radio frequency (RF) magnetron sputtering system. The effects of sputtering pressure on the morphological, structural, electrical and optical properties of th...

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Bibliographic Details
Published in:	Superlattices and Microstructures
Main Author:	Najwa S.; Shuhaimi A.; Ameera N.; Hakim K.M.; Sobri M.; Mazwan M.; Mamat M.H.; Yusnizam Y.; Ganesh V.; Rusop M.
Format:	Article
Language:	English
Published:	Academic Press 2014
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-84900343004&doi=10.1016%2fj.spmi.2014.03.023&partnerID=40&md5=43d662c43fab98ffe77254080dd743e8

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