The effect of sputtering pressure on structural, optical and electrical properties of indium tin oxide nanocolumns prepared by radio frequency (RF) magnetron sputtering
In the present study, transparent conductive indium tin oxide (ITO) nanocolumns are successfully deposited on glass and silicon substrates by radio frequency (RF) magnetron sputtering system. The effects of sputtering pressure on the morphological, structural, electrical and optical properties of th...
| Published in: | Superlattices and Microstructures |
|---|---|
| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
Academic Press
2014
|
| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84900343004&doi=10.1016%2fj.spmi.2014.03.023&partnerID=40&md5=43d662c43fab98ffe77254080dd743e8 |