Effect of annealing on structural, optical, and electrical properties of nickel (Ni)/indium tin oxide (ITO) nanostructures prepared by RF magnetron sputtering

Nickel (Ni)/indium tin oxide (ITO) nanostructures were deposited on glass and silicon (1 1 1) substrates by RF magnetron sputtering using nickel and ITO (In-Sn, 90-10%) targets. The post-deposition annealing has been performed for Ni/ITO films in air. The effect of annealing temperature on the elect...

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Bibliographic Details
Published in:Superlattices and Microstructures
Main Author: Sobri M.; Shuhaimi A.; Hakim K.M.; Ganesh V.; Mamat M.H.; Mazwan M.; Najwa S.; Ameera N.; Yusnizam Y.; Rusop M.
Format: Article
Language:English
Published: Academic Press 2014
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-84897405033&doi=10.1016%2fj.spmi.2014.02.010&partnerID=40&md5=7a17598b8fe51220375c51f97c7a2b83