Effects of growth temperature on the structural properties of Zinc oxide nanograins deposited by RF magnetron sputtering

• Published in: Advanced Materials Research
• Main Author: Ameera N.; Shuhaimi A.; Najwa S.; Hakim K.M.; Mazwan M.; Sobri M.; Mamat M.H.; Musa M.Z.; Rusop M.
• Format: Conference paper
• Language: English
• Published: 2014
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84896885479&doi=10.4028%2fwww.scientific.net%2fAMR.895.500&partnerID=40&md5=0a45372a182a8c440dc5b5ed519c55f7

Nanograins zinc oxide (ZnO) with c-axis preferred orientation was deposited on glass substrates by RF magnetron sputtering. It was performed with a ZnO target with 99.999% purity at RF power of 200 W. The deposition was carried out in argon and oxygen ambient at the ratio flowrates of 10 and 5 sccm respectively, with total deposition time of 1 hour. The films were grown atgrowth temperatures were specified at RT, 100, 200, 300, 400 and 500°C. The effects of the growth temperature on the ZnO structural property was investigated by x-ray diffraction (XRD). The best ZnO crystalline quality obtained at growth temperature, TG of 300°C was further characterized by field emission scanning electron microscopy (FESEM) and atomic force microscopy (AFM). © (2014) Trans Tech Publications, Switzerland.