Effects of growth temperature on the structural properties of Zinc oxide nanograins deposited by RF magnetron sputtering
Nanograins zinc oxide (ZnO) with c-axis preferred orientation was deposited on glass substrates by RF magnetron sputtering. It was performed with a ZnO target with 99.999% purity at RF power of 200 W. The deposition was carried out in argon and oxygen ambient at the ratio flowrates of 10 and 5 sccm...
| Published in: | Advanced Materials Research |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
2014
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84896885479&doi=10.4028%2fwww.scientific.net%2fAMR.895.500&partnerID=40&md5=0a45372a182a8c440dc5b5ed519c55f7 |