Influence of RF magnetron sputtering pressure on the structural, optical, and morphological properties of indium tin oxide nanocolumns

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Influence of RF magnetron sputtering pressure on the structural, optical, and morphological properties of indium tin oxide nanocolumns

In the present study, ITO nanocolumns was successfully deposited onto a glass substrate by RF magnetron sputtering. The effect of deposition pressure was investigated. X-ray diffraction analysis indicates that the intensity of the (400) peak orientation is highest at sputtering pressure of 5 mTorr....

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Bibliographic Details
Published in:	Advanced Materials Research
Main Author:	Najwa S.; Shuhaimi A.; Ameera N.; Hakim K.M.; Sobri M.; Mazwan M.; Mamat M.H.; Musa M.Z.; Rusop M.
Format:	Conference paper
Language:	English
Published:	2014
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891619113&doi=10.4028%2fwww.scientific.net%2fAMR.832.276&partnerID=40&md5=efd355fab4f77a4e2e2814ecf35ccffa

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