Influence of RF magnetron sputtering pressure on the structural, optical, and morphological properties of indium tin oxide nanocolumns
In the present study, ITO nanocolumns was successfully deposited onto a glass substrate by RF magnetron sputtering. The effect of deposition pressure was investigated. X-ray diffraction analysis indicates that the intensity of the (400) peak orientation is highest at sputtering pressure of 5 mTorr....
| Published in: | Advanced Materials Research |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
2014
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891619113&doi=10.4028%2fwww.scientific.net%2fAMR.832.276&partnerID=40&md5=efd355fab4f77a4e2e2814ecf35ccffa |