Study of annealed nickel (Ni)/indium tin oxide (ITO) nanostructures prepared by RF magnetron sputtering
Nickel (Ni) / indium tin oxide (ITO) nanostructures were deposited on glass and silicon (111) substrates by RF magnetron sputtering using a nickel target and ITO (In-Sn, 90%-10%) targets. The post-deposition annealing has been performed for Ni/ITO films in air and the effect of annealing temperature...
Published in: | Advanced Materials Research |
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Main Author: | |
Format: | Conference paper |
Language: | English |
Published: |
2014
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Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891607167&doi=10.4028%2fwww.scientific.net%2fAMR.832.695&partnerID=40&md5=6d899660ed5708de7ec54832d9e7f140 |