Humidity sensor using CVD deposited SnO2 thin film

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Humidity sensor using CVD deposited SnO2 thin film

In this paper we address sensitivity of SnO2 thin film deposited by thermal chemicalvapor deposition in terms of its behavior towards humidity variations. The structural, optical andelectrical properties of SnO2 thin film deposit at different substrate temperature grown by thermalchemical vapor depo...

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Bibliographic Details
Published in:	Advanced Materials Research
Main Author:	Shafura; Sin N.M.D.; Mamat M.H.; Ahmad S.; Rusop M.
Format:	Conference paper
Language:	English
Published:	2013
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-84875727505&doi=10.4028%2fwww.scientific.net%2fAMR.667.415&partnerID=40&md5=60a02107517a4c8471ac5134a8e7d1c7

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