Humidity sensor using CVD deposited SnO2 thin film
In this paper we address sensitivity of SnO2 thin film deposited by thermal chemicalvapor deposition in terms of its behavior towards humidity variations. The structural, optical andelectrical properties of SnO2 thin film deposit at different substrate temperature grown by thermalchemical vapor depo...
| Published in: | Advanced Materials Research |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
2013
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84875727505&doi=10.4028%2fwww.scientific.net%2fAMR.667.415&partnerID=40&md5=60a02107517a4c8471ac5134a8e7d1c7 |