Humidity sensor using CVD deposited SnO2 thin film

Humidity sensor using CVD deposited SnO2 thin film

In this paper we address sensitivity of SnO2 thin film deposited by thermal chemicalvapor deposition in terms of its behavior towards humidity variations. The structural, optical andelectrical properties of SnO2 thin film deposit at different substrate temperature grown by thermalchemical vapor depo...

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Published in:Advanced Materials Research
Main Author: Shafura; Sin N.M.D.; Mamat M.H.; Ahmad S.; Rusop M.
Format: Conference paper
Language:English
Published: 2013
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-84875727505&doi=10.4028%2fwww.scientific.net%2fAMR.667.415&partnerID=40&md5=60a02107517a4c8471ac5134a8e7d1c7
id 2-s2.0-84875727505
spelling 2-s2.0-84875727505
Shafura; Sin N.M.D.; Mamat M.H.; Ahmad S.; Rusop M.
Humidity sensor using CVD deposited SnO2 thin film
2013
Advanced Materials Research
667

10.4028/www.scientific.net/AMR.667.415
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84875727505&doi=10.4028%2fwww.scientific.net%2fAMR.667.415&partnerID=40&md5=60a02107517a4c8471ac5134a8e7d1c7
In this paper we address sensitivity of SnO2 thin film deposited by thermal chemicalvapor deposition in terms of its behavior towards humidity variations. The structural, optical andelectrical properties of SnO2 thin film deposit at different substrate temperature grown by thermalchemical vapor deposition (CVD) are also reviewed. FESEM image reveal smallest particle size ofSnO2 at substrate temperature 500°C. Pl measurement shows red shift of SnO2 at substratetemperature 500°C. All thin film performing slightly linear sensitivities towards relative humidity(RH%). © (2013) Trans Tech Publications, Switzerland.

10226680
English
Conference paper
author Shafura; Sin N.M.D.; Mamat M.H.; Ahmad S.; Rusop M.
spellingShingle Shafura; Sin N.M.D.; Mamat M.H.; Ahmad S.; Rusop M.
Humidity sensor using CVD deposited SnO2 thin film
author_facet Shafura; Sin N.M.D.; Mamat M.H.; Ahmad S.; Rusop M.
author_sort Shafura; Sin N.M.D.; Mamat M.H.; Ahmad S.; Rusop M.
title Humidity sensor using CVD deposited SnO2 thin film
title_short Humidity sensor using CVD deposited SnO2 thin film
title_full Humidity sensor using CVD deposited SnO2 thin film
title_fullStr Humidity sensor using CVD deposited SnO2 thin film
title_full_unstemmed Humidity sensor using CVD deposited SnO2 thin film
title_sort Humidity sensor using CVD deposited SnO2 thin film
publishDate 2013
container_title Advanced Materials Research
container_volume 667
container_issue
doi_str_mv 10.4028/www.scientific.net/AMR.667.415
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-84875727505&doi=10.4028%2fwww.scientific.net%2fAMR.667.415&partnerID=40&md5=60a02107517a4c8471ac5134a8e7d1c7
description In this paper we address sensitivity of SnO2 thin film deposited by thermal chemicalvapor deposition in terms of its behavior towards humidity variations. The structural, optical andelectrical properties of SnO2 thin film deposit at different substrate temperature grown by thermalchemical vapor deposition (CVD) are also reviewed. FESEM image reveal smallest particle size ofSnO2 at substrate temperature 500°C. Pl measurement shows red shift of SnO2 at substratetemperature 500°C. All thin film performing slightly linear sensitivities towards relative humidity(RH%). © (2013) Trans Tech Publications, Switzerland.
publisher
issn 10226680
language English
format Conference paper
accesstype
record_format scopus
collection Scopus
_version_ 1814778510414184448

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