Humidity sensor using CVD deposited SnO2 thin film
In this paper we address sensitivity of SnO2 thin film deposited by thermal chemicalvapor deposition in terms of its behavior towards humidity variations. The structural, optical andelectrical properties of SnO2 thin film deposit at different substrate temperature grown by thermalchemical vapor depo...
| Published in: | Advanced Materials Research |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
2013
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84875727505&doi=10.4028%2fwww.scientific.net%2fAMR.667.415&partnerID=40&md5=60a02107517a4c8471ac5134a8e7d1c7 |
| Summary: | In this paper we address sensitivity of SnO2 thin film deposited by thermal chemicalvapor deposition in terms of its behavior towards humidity variations. The structural, optical andelectrical properties of SnO2 thin film deposit at different substrate temperature grown by thermalchemical vapor deposition (CVD) are also reviewed. FESEM image reveal smallest particle size ofSnO2 at substrate temperature 500°C. Pl measurement shows red shift of SnO2 at substratetemperature 500°C. All thin film performing slightly linear sensitivities towards relative humidity(RH%). © (2013) Trans Tech Publications, Switzerland. |
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| ISSN: | 10226680 |
| DOI: | 10.4028/www.scientific.net/AMR.667.415 |