Surface morphology and Si 2p binding energy investigation of multilayer porous silicon nanostructure

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Surface morphology and Si 2p binding energy investigation of multilayer porous silicon nanostructure

Multilayer structure of porous silicon was fabricated using electrochemical etching method. Average thickness of multilayer structure was verified. Surface morphology from Atomic Force Microscopy (AFM) shows that surface roughness was decreased when higher etching time applied to the samples. Si 2p...

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Bibliographic Details
Published in:	Advanced Materials Research
Main Author:	Radzi A.A.S.M.; Yarmo M.A.; Rusop M.; Abdullah S.
Format:	Conference paper
Language:	English
Published:	2013
Online Access:	https://www.scopus.com/inward/record.uri?eid=2-s2.0-84871902339&doi=10.4028%2fwww.scientific.net%2fAMR.620.17&partnerID=40&md5=08bacc3d290542b1c51584243c76adc0

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