Surface morphology and Si 2p binding energy investigation of multilayer porous silicon nanostructure
Multilayer structure of porous silicon was fabricated using electrochemical etching method. Average thickness of multilayer structure was verified. Surface morphology from Atomic Force Microscopy (AFM) shows that surface roughness was decreased when higher etching time applied to the samples. Si 2p...
| Published in: | Advanced Materials Research |
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| Main Author: | |
| Format: | Conference paper |
| Language: | English |
| Published: |
2013
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84871902339&doi=10.4028%2fwww.scientific.net%2fAMR.620.17&partnerID=40&md5=08bacc3d290542b1c51584243c76adc0 |